This question faces a tremendous amount of uncertainty. So much rides on whether the power/$ of EUV sources can be significantly boosted. No one knows when (or even whether) this will happen.

It's not even known whether we will reach 10nm any time soon, as the article asserts we will.

The industry's history has inculcated a huge amount of technological optimism, but someday that optimism will be misplaced. There is a fairly high chance that day is today.